In the detection room, the Shenguang 1x-ray lithography machine is running, and a group of staff are still tirelessly testing and adjusting.

As the chief technology executive of SMIC, Li Weiguang's technical level is quite good. He stared at the giant in front of him. What a wonderful flower of industry.

Li Weiguang thought to himself that this lithography machine is a beautiful woman with a beautiful appearance, not a golden jade.

Gao Zhiyuan pointed to the lithography machine and introduced: "The lithography machine in front of you is the Shenguang Instrument's development of Shenguang 1x-ray lithography machine. I believe everyone has already understood the specific technical indicators."

Li Weiguang, Zhao Jun and others certainly understand that the technical indicators of the Shenguang 1x-ray lithography machine are found in the annex of the announcement of the Ministry of Industry and Information Technology, which they have studied on the way.

"Mr. Gao, can your lithography machine be accurate to 10-7 nanometers?" Li Weiguang asked hurriedly.

"I know everyone is very suspicious. There are eight-inch silicon wafers on the side. SMIC should have brought technicians here, right?"

Li Weiguang nodded.

Gao Zhiyuan pointed to the warehouse on one side and continued: "You can send someone to carry the silicon wafer and conduct lithography tests with our employees."

"Then we are more respectful than obedience." Li Weiguang turned his head and ordered the people of SMIC: "Mr. Zhang, Mr. Li, please trouble you."

Two middle-aged technicians took action quickly, and they carefully took out the silicon wafer with the help of tools.

These silicon wafers are not only expensive, but also very fragile. Not to mention falling to the ground, it is best not to contact the air directly, because it will be very troublesome to get contaminated with dust.

Send two silicon wafers into a special cleaning equipment, then apply photoresist, spread the photoresist to a certain thickness, and dry the photoresist on the surface of the silicon wafer.

The processes are very complicated and there should be no mistakes. This not only tests the equipment, but also tests the level of technicians.

If one of the steps makes mistakes, not only will it be wasted for a long time, but consumables such as silicon wafers, photoresist, and cleaning liquid will be wasted, and these are all real money.

No wonder scientific research is just burning money.

More than an hour passed, and finally the step of silicon wafer lithography was reached. An eight-inch silicon wafer was sent into it by the automatic equipment of the lithography machine.

In order to avoid affecting the lithography effect, Li Gong observed the silicon wafer through a lens in a small window for a while, then closed the small window, allowing the lithography chamber to form a dark box.

Mr. Zhang selected some mask templates (circuit diagram motherboard) on the computer, randomly selected one of the templates, and entered the size to adjust it.

Because the area required for different chip circuit diagrams is different, how many chips can be carved out on a silicon wafer must be adjusted according to actual conditions.

The staff communicated with simple gestures. Even if they were talking louder around such high-precision equipment, it might affect the lithography results.

Lithography begins.

In about 16 seconds, the liquid-lithography-completed silicon wafer appears on the other side.

Then I quickly processed the second silicon wafer, which also came out in about 16 seconds.

Zhao Jun, Li Weiguang, Fang Long and others outside the testing room were all staring at the two photolithographic silicon wafers.

Mr. Zhang and Mr. Li used special equipment, each of whom was responsible for a silicon wafer, and transferred it to the electron microscope detection room next door.

Under the electron microscope, the circuit pattern on the silicon wafer is exactly the same as the template, and the only difference is the size.

"It can actually be 7 nanometers, which is incredible." Gong Li exclaimed at the electron microscope.

"Not only that, the patterns etched by x-rays are very neat and delicate, which is a masterpiece," Zhang Gong added.

The two of them conducted a very comprehensive inspection of the two silicon wafers and finally generated two inspection reports.

Li Weiguang, who was anxious outside, saw the two of them coming out and couldn't wait to step forward and ask, "What's the result?"

SMIC and HiSilicon looked at the two of them nervously and expectantly, hoping that it would be good news, not bad news.

"Mr. Li, the accuracy of the Divine Light 1x-ray lithography machine has indeed reached 10 to 7 nanometers, which is even better than the extreme ultraviolet light effect of Asmay." Zhang Gong explained.

Huh! Everyone breathed a sigh of relief.

Mr. Li handed two test reports to Li Weiguang: "This is a specific test report."

Everyone from SMIC quickly circulated.

After reading the detailed inspection report, Zhao Jun and Li Weiguang's breathing became heavier. This divine light 1x-ray lithography machine was a little stronger than ASMA's top lithography machine.

At least the top lithography machine of ASMA Company seems a little overwhelmed when facing 7nm chips, while the Shenguang 1x-ray lithography machine is easy to use.

If they knew that Huang Mingzhe deliberately limited the accuracy, they would understand why they could easily do so.

"Mr. Gao, I will pay tribute to you as a Chinese chipman." Li Weiguang said excitedly.

As a Chinese chipmaker, they live too frustrated, and the pressure at home and abroad almost made them breathless.

The appearance of the Divine Light 1x-ray lithography machine made Li Weiguang and others feel proud, and finally there was no need to endure the cynicism of those birds.

"We dare not take credit for it. In fact, this lithography machine can be born, and the president will account for 90% of the credit." Gao Zhiyuan said it is not an exaggeration at all.

The direction of the x-ray lithography machine was chosen by Huang Mingzhe. The two key materials come from the photosensitive material regular models, and the complete software system is closely related to Huang Mingzhe.

In addition, there are simulation space technology and finite element inverse analysis technology mastered by the Thinking Society, which promotes the strength of Shenguang Instrument Company in integration and improvement.

Although everyone was very surprised by SMIC and HiSilicon, the Shenguang Instrument researchers or employees present agreed with Gao Zhiyuan's words. Zhao Jun and others did not break the idea of ​​asking the whole story.

"Mr. Gao, I wonder what the price of the Divine Light 1x-ray lithography machine is?" Zhao Jun asked hurriedly.

"1.5 billion per unit."

Gulu! Although Zhao Jun had already expected that the price of the Divine Light 1x-ray lithography machine would be very high, he did not expect it to be as high as 1.5 billion.

Of course, it is understandable that the high price is high. Shenguang Instruments' R&D funds are always made back, and no one wants to lose money when doing business.

But then he relaxed because there was a subsidy for purchasing a divine light 1x-ray lithography machine, and the subsidy provided by the state was as high as 40%.

In other words, the Shenguang 1x-ray lithography machine has 1.5 billion yuan, and the subsidy will be 900 million yuan.

However, this subsidy policy is only two years at the moment, and it must be obtained by Chinese enterprises. In addition, every lithography machine will be registered and cannot be transferred at will.

In addition, the subsidy is not directly paid, but after the enterprise purchases the full amount from Shenguang Instruments, the state will offset this part of the subsidy by tax exemption.

Zhao Jun and Li Weiguang discussed for a while, and finally reached an agreement with Shenguang Instruments. SMIC booked 10 Shenguang 1x-ray lithography machines for Shenguang Instruments, and the contract was implemented in two years.

This contract is as high as 15 billion, and this year's 5 units have orders of 7.5 billion. Shenguang Instruments requires a deposit of 50%.

And if you order, no matter whether the company wants to buy a lithography machine or not, Shenguang Instruments will not refund the order. If the order is cancelled without reason, not only will the deposit not be refunded, but it will also be included in the blacklist of Siwei Society.

As a listed company, SMIC immediately announced the news that it had booked 10 Shenguang 1x-ray lithography machines from Shenguang Instruments.

This huge order not only knocked the whole world out, but also stimulated SMIC's stock soaring, with the stock price soaring 16% that day.
Chapter completed!